Henan Chuanghe Laboratory Equipment Co., Ltd.

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13.56MHz 5L Plasma Cleaner

Product Description

Chuanghe Laboratory Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

Our RF generator has 40KHz, 13.56Mhz, 20MHz,according to the usage, can choose the suitable RF Power. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.


1. Ultra-cleaning of organic pollutants (such as paraffin, oil, release agent, protein, etc.) on metal, glass, silicon wafer, ceramic, plastic, and polymer surfaces.

2. Change the performance of certain material surfaces.

3. Activate the surface of glass, plastic, ceramics, etc. to enhance the adhesion, compatibility and wettability of these materials.

4. Remove the oxide layer on the surface of the metal material.

5. Disinfect and sterilize the object to be cleaned.

Technical Parameter

Model No.CH-5ST
Chamber MaterialStainless Steel
Chamber SizeΦ150*270mm
Chamber Capacity5L
Power SupplyAC220V,50Hz
Working Current<1.2A
Coupled ModeCondenser Coupling,without pollute sample 
RF Power0-300w adjustable
RF offset<0.2KHz
Characteristic impedance50Ω,automatic matching
Vacuum Range1Pa-30Pa
Programmable ControlPLC programmable control, Auto/Manual
Cleaning Time1-9999second adjustable
Gas Speed

Two way float flow gas control

10-300ml/min, adjustable

Pressure Gauge
A simple digital pressure gauge is equipped for reading
Vacuum Pump2XZ-4

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