Tube Furnace with 4 Channel Gas Flow Station CVD system 1260C-3Z

Double-layer steel casing with air cooling.

Built-in thermostat to control Cooling running automatically when case > 55°C.

High purity Quartz tube

OD60*1200mm Length

Max. Heating Temp.: 1200°C

Continuous Working Temp.: 1100°C

• PID automatic control with 30 steps programmable segments.

• Temperature accuracy: ±1°C

• Thermocouple: K type built inside the furnace

Nitrogen   N2     33 L/s

Helium      He     39 L/s   (2340L/minute)

Hydrogen H2   32 L/s