Product Description
SN1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.
Technical Parameter
Item No. | SN1200X-H8 |
Quartz Tube |
|
Heating Element | Fe-Cr-Al Alloy Doped by Mo |
Limted Temperature | 1200℃ |
Max Working Temperature |
|
Heating Rate | ≤20℃/min(suggestion:10℃/min) |
Gas Inlet and Outlet & Water cooling |
|
Temperature Control |
|
Temperature Accuracy | ±1℃ |
Power Supply | 208~240V AC, Single phase, 50/60 Hz Note: Power cable included, but without the plug |
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