SN1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.
|Heating Element||Fe-Cr-Al Alloy Doped by Mo|
|Max Working Temperature|
|Gas Inlet and Outlet & Water cooling|
208~240V AC, Single phase, 50/60 Hz
Note： Power cable included, but without the plug