Henan Chuanghe Laboratory Equipment Co., Ltd.

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EZ4-S small vacuum spin coater for 4 inch wafer in glove box

Product Description

1.Maximum for 4 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm 

4.LCD Panel with Enghlish Instruction Manual Book

5.Oiless vacuum pump with low noise

6.Can put in vacuum glove box

Technical Parameter

Model No.EZ4-S
Chamber Size134mm
Maximum wafer sample4 inch (100mm)
Vacuum Chuck

3 pieces standard vacuum chuck

Size: O.D8mm, 15mm,55mm for immediately using

***Customized vacuum chuck is availiable***

Spin Speed100~9999RPM
Spin Control

Programmable control,5 programmable with each 5 steps can restore

Spin Resolution1 rpm
Power supplyAC110-230V, adjustable

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