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Product Description
2.Matrial:Anodic Oxidation Aluminium Shell,
3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm
4.LCD Panel with Enghlish Instruction Manual Book5.Oiless vacuum pump with low noise
6.Can put in vacuum glove box
Technical Parameter
| Model No. | EZ4-S |
| Chamber Size | 134mm |
| Maximum wafer sample | 4 inch (100mm) |
| Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
| Spin Speed | 100~9999RPM |
| Spin Control | Programmable control,5 programmable with each 5 steps can restore |
| Spin Resolution | 1 rpm |
| Power supply | AC110-230V, adjustable |
| Dimension | 250*210*200mm |
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