Henan Chuanghe Laboratory Equipment Co., Ltd.

Henan Chuanghe Laboratory Equipment Co., Ltd. CN EN
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6" wafer precision control vacuum spin coater CH-150T

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Product Description

Features
1.Maximum for 6 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 2", 4", 6"

4.LCD Panel with Enghlish Instruction Manual Book
5.Oiless vacuum pump with low noise

Technical Parameter

Max.Wafer Diameter6”
Speed adjustable range 10~10000rpm,adjustable
Acceleration range10000rpm/s
Speed resolution1rpm
Max single step time15-10000sec,adjustable
Time resolution1s
Programmable control50 programmable,20 steps
Motor400w AC Servo Motor
Vacuum plate2”/4”/6” vacuum plate,each size one piece
Working voltageAC220V, 50Hz
Dimension470*450*320mm



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