Product Description
Chuanghe Laboratory Plasma Cleaner divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.
Our RF generator has 40KHz, 13.56Mhz, 20MHz,according to the usage, can choose the suitable RF Power. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.
Features:
1. Ultra-cleaning of organic pollutants (such as paraffin, oil, release agent, protein, etc.) on metal, glass, silicon wafer, ceramic, plastic, and polymer surfaces.
2. Change the performance of certain material surfaces.
3. Activate the surface of glass, plastic, ceramics, etc. to enhance the adhesion, compatibility and wettability of these materials.
4. Remove the oxide layer on the surface of the metal material.
5. Disinfect and sterilize the object to be cleaned.
Technical Parameter
Model No. | CH-MF150 |
Chamber Material | Quartz Tube |
Chamber Size | ¢150*250mm |
Chamber Capacity | 4L |
Power Supply | AC220V,50Hz |
Vacuum Gauge | Digital Gauge |
Frequency | 40KHz (13.56MHz for optional) |
Coupled Mode | Condenser Coupling,without pollute sample |
RF Power | 500w optional |
RF offset | <0.2KHz |
Characteristic impedance | 50Ω,automatic matching |
Vacuum Range | Limited 5Pa |
Gas Speed | Two way float flow gas control 60-600ml/min, adjustable |
Pressure Gauge | A simple digital pressure gauge is equipped for reading |
Vacuum Pump | VRD-8 |
Dimension | 420*390*300mm |
Rated Power | 1500W |
Related Product