AC300 desktop vacuum spin coating machine upto 12 inch wafer

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Product Description

Features

1.Maximum for 12 inch wafer coating

2.Matrial:Staianless steel with Tflon coating chamber

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm

4.7"LCD Panel with Enghlish Instruction Manual Book

5.Oiless vacuum pump with low noise

6.Servo motor, more stability

Technical Parameter

Model No.	AC300
Maximum wafer sample	12 inch (300mm)
Chamber material	HDPE
Vacuum Chuck	3 pieces standard vacuum chuck Size: O.D4", 6",8" for immediately using *Customized vacuum chuck is availiable*
Spin Speed	100~5000RPM
Acceleration adjustable range	0~10000rpm/s
Each step max coating time	3000s
Servo motor power	200w
Spin Control	Programmable control,100programmable with each 100steps can restore
Spin Resolution	1 rpm
Power supply	AC110-230V, adjustable