AC200 servo motor vacuum spin coater for max 8 inch wafer spin coating

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Product Description

Features

1.Maximum for 8 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm

4.7"LCD Panel with Enghlish Instruction Manual Book

5.Oiless vacuum pump with low noise

6.Servo motor, more stability

Technical Parameter

Model No.	AC200
Chamber Size	210mm
Maximum wafer sample	8 inch (200mm)
Chamber material	HDPE
Vacuum Chuck	3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using *Customized vacuum chuck is availiable*
Spin Speed	100~12000RPM
Acceleration adjustable range	0~50000-rpm/s
Each step max coating time	3000s
Servo motor power	200w
Spin Control	Programmable control,100programmable with each 100steps can restore
Spin Resolution	1 rpm
Power supply	AC110-230V, adjustable
Dimension	433306306mm