AC200 servo motor vacuum spin coater for max 8 inch wafer spin coating

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Product Description

Features

1.Maximum for 8 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm

4.7"LCD Panel with Enghlish Instruction Manual Book

5.Oiless vacuum pump with low noise

6.Servo motor, more stability

Technical Parameter

Model No.	AC200
Maximum wafer sample	8 inch (200mm)
Chamber material	HDPE
Vacuum Chuck	3 pieces standard vacuum chuck Size: O.D10mm, 25mm,2“ chuck for immediately using *Customized vacuum chuck is availiable*
Spin Speed	20~12000RPM
Acceleration adjustable range	20~50000-rpm/s
Each step max coating time	3000s
Time resolution	0.1s
Servo motor power	200w
Spin Control	Programmable control,100programmable with each 100steps can restore
Spin Resolution	+/-1 rpm
Power supply	AC110-230V, adjustable
Coating uniformity	4" wafer:± 0.49%; tickness:500mm 6" wafer:± 0.76%; tickness:1300mm 8" wafer:± 0.92%; tickness:1350mm