Product Description
2.Matrial:Anodic Oxidation Aluminium Shell,
3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm
4.LCD Panel with Enghlish Instruction Manual BookTechnical Parameter
Model No. | EZ4 |
Chamber Size | 134mm |
Maximum wafer sample | 4 inch (100mm) |
Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
Spin Speed | 100~999RPM |
Spin Control | Programmable control,5 programmable with each 5 steps can restore |
Spin Resolution | 1 rpm |
Power supply | AC110-230V, adjustable |
Dimension | 250*210*200mm |
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