Henan Chuanghe Laboratory Equipment Co., Ltd.

Henan Chuanghe Laboratory Equipment Co., Ltd. CN EN
Home > Products > Laboratory Coating Machine > Vacuum Spin Coater
EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump
EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pumpEZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pumpEZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump

EZ4 compact vacuum spin coater for 4inch wafer coating with oilless vacuum pump

Inquire Now None

Product Description

Features
1.Maximum for 4 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm 

4.LCD Panel with Enghlish Instruction Manual Book
5.Oiless vacuum pump with low noise

Technical Parameter

Model No.EZ4
Chamber Size134mm
Maximum wafer sample4 inch (100mm)
Vacuum Chuck

3 pieces standard vacuum chuck

Size: O.D8mm, 15mm,55mm for immediately using

***Customized vacuum chuck is availiable***

Spin Speed100~999RPM
Spin Control

Programmable control,5 programmable with each 5 steps can restore

Spin Resolution1 rpm
Power supplyAC110-230V, adjustable
Dimension250*210*200mm



Related Product

< >
Products List

Ultrasonic Homogenizer
Laboratory Press Machine

Manual Hydraulic Press

Electric Hydraulic Press

CIP Press

Heating Press

Pressing Die

Laboratory Coating Machine

Vacuum Spin Coater

DIP Coater

Tape Coater

Plasma Cleaner

13.56MHz Plasma Cleaner

40KHz Plasma Cleaner

Grinding&Polishing Machine

Polishing Machine

Grinding Machine

Laboratory Cutting Machine
Laboratory Oven
Tube Furnace
Muffle Furnace
CVD System
Laboratory Ball Mill
Glove Box
NAT Centrifuge
Magnetic Stirrer
Search
News List
2019CPS in Zheng...
NAVIGATION
Products
Contact Us
  • Mobile: +86 13164339149
  • E-mail: karen.chen@aliyun.com
  • Skype: karen.chen_28
  • Add: Room 77, 10th floor, 1st Building, 16# Changchun Road, Hi-tech Zone, Zhengzhou City, Henan Province
Follow Us

Copyright © Henan Chuanghe Laboratory Equipment Co., Ltd. All Rights Reserved Sitemap