Product Description
Fully enclosed development to avoid the mist from spreading to the outside and polluting the environment
Shell sprayed, corrosion-resistant, easy to clean
The inner cavity is plated with Teflon, which is smooth, corrosion-resistant and easy to clean
Built-in vacuum filter to prevent liquid from being sucked into the vacuum pump
Adjustable vacuum pressure, real-time display of pressure value
Technical Parameter
Model No. | DM200-SE |
Max Wafer | 200mm (8”) wafer |
Speed Resolution | ±1 rpm |
Spin Speed | 20~3000rpm(empty load) |
Acceleration | 20~10000rpm/sec |
Time setting | 0~3000sec/set |
Time accuracy | 0.1 sec |
Insert Tube | 1 way developer liquid1 way DI water1 way Nitrogen |
Dimension | 550*600*405mm |
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