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Product Description
7"LCD Panel with Enghlish Instruction Manual Book
Telon/Polyethylne closed vacuum chamber design, suitable for various sample coating
maxiting coating speed can upto 10000rpm, also can do customized
Servo motor, more stability
Exhaust and pumping system at the bottom of the stage for efficient exhaust efficiency and coating uniformity
Technical Parameter
| Model No. | AC200-V |
| Maximum wafer sample | 8 inch (200mm) |
| Chamber material | HDPE |
| Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
| Spin Speed | 100~12000RPM |
| Acceleration adjustable range | 0~50000-rpm/s |
| Each step max coating time | 3000s |
| Servo motor power | 200w |
| Spin Control | Programmable control,100programmable with each 100steps can restore |
| Spin Resolution | 1 rpm |
| Power supply | AC110-230V, adjustable |
| Dimension | 433*306*306mm |
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